硅通孔电迁移寿命评价系统设计
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1.厦门理工学院材料科学与工程学院 厦门 361024; 2.工业和信息化部第五电子研究所电子元器件 可靠性物理及其应用技术实验室 广州 511370

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TN40

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国家重点研发计划项目(2023YFB4404103)、福建省自然科学基金(2022J011264)项目资助


Design of evaluation system for electromigration lifetime of through-silicon via
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1.School of Material Science and Engineering, Xiamen University of Technology,Xiamen 351024, China; 2.Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, The Fifth Electronics Research Institute of the Ministry of Industry and Information Technology,Guangzhou 511370, China

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    摘要:

    由于缺乏专门的试验系统,三维封装中的硅通孔电迁移寿命评价往往需要借助多种设备和仪器,以应对不同试验需求,这不仅增加了试验的复杂性,还可能引入不确定性因素。以LabVIEW作为上位机软件开发平台,可编程控制器和工控机作为核心控制单元,联合精密电源、高精度万用表、继电器阵列、样品连接端等研发了TSV电迁移寿命评价系统,以确保对TSV电迁移试验过程中电压、电流等关键参数的准确采集和监测。借助研发的TSV电迁移寿命评价系统,通过开展双通孔TSV样品电迁移加速寿命试验,分析了TSV在不同电应力(1×105、5×105和1×106 A/cm2)和温度应力(25℃、50℃和75℃)条件下的特征失效特性。实验结果表明,相同温度下,电流越大TSV样品失效越快,在25℃下电流密度为1×105 A/cm2时的样品失效时间约为56.2 h,而1×106 A/cm2时仅为10.5 h;电流相同时,温度越高TSV样品失效越快,温度从25℃升高到75℃时,样品失效时间减少了约64.9%。基于TSV样品失效时间得到其特征失效时间,并通过设计算法得到TSV电迁移Black寿命模型及其参数,Ea=0.672、n=0.665 825、A=6.089 99×10-130。

    Abstract:

    The evaluation of electromigration lifetime of through-silicon via in 3D packaging often requires multiple equipment and instruments to cope with different test requirements, which not only increases the complexity, but also may introduce uncertainties. The LabVIEW was conducted as the upper computer, the programmable controller and industrial personal computer were used as the core control unit, and the lifetime evaluation system of TSV electromigration was developed by combining the precision power supply, high-precision multimeter, relay array, and sample connecting terminal, so as to ensure the accurate acquisition and monitoring of the key parameters. With the aid of the developed evaluation system for electromigration lifetime of TSV, the characteristic failure properties of TSV were analyzed under different electrical stresses (1×105、5×105 and 1×106 A/cm2) and temperature stresses (25℃、50℃ and 75℃) by carrying out the accelerated electromigration lifetime tests on dual-via TSV samples. The experimental results show that at the same temperature, the higher the current, the faster the TSV samples fail. The failure time of the samples at the current density of 1×105 A/cm2 at 25℃ is about 56.2 h, while it is only 10.5 h at 1×106 A/cm2. When the current is the same, the higher the temperature, the faster the TSV samples fail, and the failure time decreases as the temperature is increased from 25℃ to 75℃ by about 64.9%. The characteristic failure time of the TSV samples is obtained based on their failure time, and the Black lifetime model of TSV electromigration and its parameters are obtained through design algorithms, with Ea=0.672, n=0.665 825, and A=6.089 9×10-130.

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张立廷,龚涛,陈思,周斌,卢向军.硅通孔电迁移寿命评价系统设计[J].电子测量技术,2025,48(2):75-83

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  • 在线发布日期: 2025-03-12
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